The paper reports that the intensity of generation and the concentration of low-temperature thermal donors (LTD) at 450°C in silicon, where fast diffusing impurities (FDI) are stabilized by means of binding them into electrically neutral chemically bound complexes with sulfur, are significantly lower compared to their intensity and concentration in reference samples of silicon doped with sulfur and pure reference samples. The “Kaiser model” states that the initial rate of generation of low-temperature thermal donors is proportional to biquadrate, and their maximum concentration is to the third degree of oxygen concentration. According to the Kaiser model of thermal donor generation, LTD represent predominantly stable tetrahedrons (i.e. SiO4 molecules). However, the Kaiser model does not take into account the possibility of interaction of oxygen with other impurities that might lead to the formation of electrically active centers. Based on the analysis of experimental results of Si<S> samples subjected to heat treatment the authors recommend a revision of the principles of LTD in silicon in view of behavior of FDI, as they play a key role in the process of the formation of LTD. Thus, in the present paper the authors effectively are attempting to shed light on the anticipated role of impurity centers with deep levels in the process of formation of thermal donors.
Published in | American Journal of Aerospace Engineering (Volume 7, Issue 1) |
DOI | 10.11648/j.ajae.20200701.11 |
Page(s) | 1-5 |
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This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited. |
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Copyright © The Author(s), 2020. Published by Science Publishing Group |
Silicon, Oxygen, Sulfur, Thermal Donors (LTD), Fast Diffusing Impurities (FDI), Electrically Neutral Chemically Bound Molecules
[1] | C. S. Fuller, J. A. Ditzenberger, N. B. Hanny, E. Buehler Resistivity Changes in Silicon Induced by Heat Treatment // Phus. Rev. 1954. V. 96. №3. Р. 833. |
[2] | W. Kaiser, P. H. Keck, C. F. Lange Infrared Absorption and Oxygen Content in Silicon and Germanium // Phus. Rev. 1956. V. 101. №3. Р. 1264–1268. |
[3] | C. S. Fuller, R. A. Logan, N. B. Hanny Effect of Heat Treatment upon the Electrical Properties of Silicon Crystals // J. Appl. Phys. 1957. V. 28. №12. Р. 1427–1436. |
[4] | W. Kaiser Electrical and Optical Properties of Heat–treated silicon // Phus. Rev. 1957. V. 105. №6. Р. 1751–1756. |
[5] | R. A. Logan, A. J. Peters Diffusion of Oxygen in Silicon // J. Appl. Phys. 1957. V. 28.№7. Р. 819–820. |
[6] | H. J. Hrostowski, R. H. Kaiser Infrared Spectrum of Heat Treatment Centers in Silicon // Phys. Rev. Lett. 1958. V. 1. №6. Р. 199–200. |
[7] | W. Kaiser, H. L. Frisch, H. Reiss Mechanism of the Formation of Donors States in Heat - Treated Silicon // Phus. Rev. 1958. V. 112.№5. Р. 1546–1554. |
[8] | F. J. Morin, J. P. Maita, R. G. Shulman, N. B. Hanny Impurity Levels in Silicon // Phus. Rev. 1954. V. 96. №3. Р. 883. |
[9] | V. N. Mordkovich. O vliyanii kisloroda na provodimost kremniya [On influence of oxygen of silicon conductivity] // FTT [Solid State Physics]. 1964. V. 6. №3. P. 847–851. |
[10] | P. Gavortsevskiy, S. Gele, D. Mali, H. Rimani. Vliyaniye termoobrabotki monokristallov kremniya s vysokim soderjaniyem kisloroda na elektrofizicheskiye parametri [On how thermal annealing of single crystalline silicon with high concentration of oxygen influences electro-physical parameters] // Svoystva legirovannyx poluprovodnikov [Properties of doped semiconductors]. M: Nauka, 1977. P. 203–210. |
[11] | J. P. Suchet Sur le role de I’oxygene dans les crictaux de silicium // J/Chim. Phus. 1961. V. 58. P. 445–463. |
[12] | J. P. Suchet. Fizicheskaya himiya poluprovodnikov [Physical Chemistry of Semiconductors]. M.: Metallurgy, 1969, 105 pgs. |
[13] | C. S. Fuller, F. H. Doleiden Interaction between Oxygen Acceptor Elements in Silicon // J. Appl. Phus. 1958. V. 29. № 8. Р. 1264–1265. |
[14] | C. S. Fuller, F. H. Doleiden, K. Wolfstirn Reactions of Group III Acceptors with Oxygen in Silicon Crystals // J. Phus. Chem. Solids. 1960. V. 13. Р. 187–203. |
[15] | V. V. Batavın, E. A. Salnık. Vlııanıe aktseptorov na generatsıyu termodonorov v kremnıı, soderjaem kıslorod [Influence of acceptors on generation of thermal donors in oxygen-containing silicon]// Elektron. Tehnıka. Ser. VI. Materıaly [Electron. Technology]. Ser. VI. Materials. 1980. №5. P. 42–45. |
[16] | K. Graff, H. Pieper, G. Goldbach Carrier Lifetime Doping of p –type Silicon by Annealing processes // Semiconductor Silicon 1973 / Eds Huff H. R., Burgess R. R. P. 170–178. |
[17] | K. Graff, H. Pieper The Carrier Lifetime of Heat Treated Silicon Crystals // J. Electron. Mater. 1975. V. 4. № 2. P. 281–298. |
[18] | D. Helmriech, E. Sirtl Oxygen in Silicon: a Modern View // Semiconductor Silicon 1977 / Eds Huff H. R., Sirtl E. P. 626–635. |
[19] | M. K. Bahadyrhanov, Sh. I. Askarov, N. Norqulov, S. N. Srajev 1994. V. 20, P. 36-41. |
[20] | M. K. Bahadyrhanov, Sh. I. Askarov, N. Norqulov, S. N. Srajev FTP [Phys. Tech. of Semicond.], V. 29, P. 1396-1401. |
[21] | M. K. Bakhadihanov, Sh. I. Askarov, N. Norkulov, Phys, Stat, Sol (a), 1994, p. 339. |
[22] | M. K. Bahadyrhanov, Sh. I. Askarov, N. Norqulov, S. N. Srajev Neorganıcheskıe materıaly [Nonorganic materials]. 1992. V. 28, P. 1606-1608. |
[23] | M. K. Bahadyrhanov, Sh. I. Askarov, N. Norqulov, S. N. Srajev Neorganıcheskıe materıaly [Nonorganic materials]. 1996. V. 32, P. 15-21. |
[24] | M. K. Bahadyrhanov, Sh. I. Askarov, N. Norqulov, S. N. Srajev Neorganıcheskıe materıaly [Nonorganic materials]. 1996. V. 32, P. 647-649. |
[25] | G. W. Ludwig and H. Woodbury. Elektronnyı spınovyı rezonans v poluprovodnıkah [Electron spin resonance in semiconductors]. MIR, M. 1964, P. 148. |
[26] | A. A. Lebedev, N. A. Sultanov, FTP [Phys and Tech. of Semicond.], 1971, V. 13, P. 1906–1912. |
[27] | Sh. Askarov, B. Sharipov, S. Srazhev, T. Toshboev, Sh. Saliyeva. Impurity States of Transition Group Elements in Silicon Lattice in the Process of Their Interaction with Sulfur //American Journal of Physics and Applications, June 14, 2018; 6 (3); 76-79. |
APA Style
Shoikrom Askarov, Bashirulla Sharipov, Shokhista Saliyeva, Abdulaziz Mavlyanov, Solizhon Srazev, et al. (2020). Kinetics of Generation of Thermal Donors in Silicon of Stabilization of States of Fast-Diffusing Impurities. American Journal of Aerospace Engineering, 7(1), 1-5. https://doi.org/10.11648/j.ajae.20200701.11
ACS Style
Shoikrom Askarov; Bashirulla Sharipov; Shokhista Saliyeva; Abdulaziz Mavlyanov; Solizhon Srazev, et al. Kinetics of Generation of Thermal Donors in Silicon of Stabilization of States of Fast-Diffusing Impurities. Am. J. Aerosp. Eng. 2020, 7(1), 1-5. doi: 10.11648/j.ajae.20200701.11
AMA Style
Shoikrom Askarov, Bashirulla Sharipov, Shokhista Saliyeva, Abdulaziz Mavlyanov, Solizhon Srazev, et al. Kinetics of Generation of Thermal Donors in Silicon of Stabilization of States of Fast-Diffusing Impurities. Am J Aerosp Eng. 2020;7(1):1-5. doi: 10.11648/j.ajae.20200701.11
@article{10.11648/j.ajae.20200701.11, author = {Shoikrom Askarov and Bashirulla Sharipov and Shokhista Saliyeva and Abdulaziz Mavlyanov and Solizhon Srazev and Tuchi Toshboev}, title = {Kinetics of Generation of Thermal Donors in Silicon of Stabilization of States of Fast-Diffusing Impurities}, journal = {American Journal of Aerospace Engineering}, volume = {7}, number = {1}, pages = {1-5}, doi = {10.11648/j.ajae.20200701.11}, url = {https://doi.org/10.11648/j.ajae.20200701.11}, eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ajae.20200701.11}, abstract = {The paper reports that the intensity of generation and the concentration of low-temperature thermal donors (LTD) at 450°C in silicon, where fast diffusing impurities (FDI) are stabilized by means of binding them into electrically neutral chemically bound complexes with sulfur, are significantly lower compared to their intensity and concentration in reference samples of silicon doped with sulfur and pure reference samples. The “Kaiser model” states that the initial rate of generation of low-temperature thermal donors is proportional to biquadrate, and their maximum concentration is to the third degree of oxygen concentration. According to the Kaiser model of thermal donor generation, LTD represent predominantly stable tetrahedrons (i.e. SiO4 molecules). However, the Kaiser model does not take into account the possibility of interaction of oxygen with other impurities that might lead to the formation of electrically active centers. Based on the analysis of experimental results of Si<S> samples subjected to heat treatment the authors recommend a revision of the principles of LTD in silicon in view of behavior of FDI, as they play a key role in the process of the formation of LTD. Thus, in the present paper the authors effectively are attempting to shed light on the anticipated role of impurity centers with deep levels in the process of formation of thermal donors.}, year = {2020} }
TY - JOUR T1 - Kinetics of Generation of Thermal Donors in Silicon of Stabilization of States of Fast-Diffusing Impurities AU - Shoikrom Askarov AU - Bashirulla Sharipov AU - Shokhista Saliyeva AU - Abdulaziz Mavlyanov AU - Solizhon Srazev AU - Tuchi Toshboev Y1 - 2020/01/08 PY - 2020 N1 - https://doi.org/10.11648/j.ajae.20200701.11 DO - 10.11648/j.ajae.20200701.11 T2 - American Journal of Aerospace Engineering JF - American Journal of Aerospace Engineering JO - American Journal of Aerospace Engineering SP - 1 EP - 5 PB - Science Publishing Group SN - 2376-4821 UR - https://doi.org/10.11648/j.ajae.20200701.11 AB - The paper reports that the intensity of generation and the concentration of low-temperature thermal donors (LTD) at 450°C in silicon, where fast diffusing impurities (FDI) are stabilized by means of binding them into electrically neutral chemically bound complexes with sulfur, are significantly lower compared to their intensity and concentration in reference samples of silicon doped with sulfur and pure reference samples. The “Kaiser model” states that the initial rate of generation of low-temperature thermal donors is proportional to biquadrate, and their maximum concentration is to the third degree of oxygen concentration. According to the Kaiser model of thermal donor generation, LTD represent predominantly stable tetrahedrons (i.e. SiO4 molecules). However, the Kaiser model does not take into account the possibility of interaction of oxygen with other impurities that might lead to the formation of electrically active centers. Based on the analysis of experimental results of Si<S> samples subjected to heat treatment the authors recommend a revision of the principles of LTD in silicon in view of behavior of FDI, as they play a key role in the process of the formation of LTD. Thus, in the present paper the authors effectively are attempting to shed light on the anticipated role of impurity centers with deep levels in the process of formation of thermal donors. VL - 7 IS - 1 ER -